Google Scholar. Photon. Review and perspective on ultrafast wavelength-size electro-optic modulators. High-speed plasmonic modulator in a single metal layer. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. & Fan, S. Complete optical isolation created by indirect interband photonic transitions. Marpaung, D., Yao, J. Opt. To improve the electro-optic coupling, we utilize a partially etched structure with a rib-waveguide-like cross-section (Figs. Nature Google Scholar. Nature 507, 341345 (2014). 9, 525528 (2015). b Zoom-in image of the photonic-crystal resonator and electrodes, corresponding to the dashed rectangular region in a. c Further zoom-in image showing the detailed structure of the photonic-crystal defects cavity, corresponding to the dashed rectangular region in b. 4, 518526 (2010). Micro-transfer printing of thin-film lithium niobate offers a solution, but suspending large areas of thin films for long interaction lengths and high-Q resonators is challenging, resulting in a low transfer . Photonics 2, 433437 (2008). J. Lightwave Technol. Li, M., Liang, H., Luo, R., He, Y. Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators. Preprint at https://arxiv.org/abs/1803.10365 (2018). 1a), where an injector section (Fig. CAS This is a preview of subscription content, access via your institution. Opt. Zhang, X. et al. 35, 346396 (2017). In 2017 Optical Fiber Communications Conference and Exhibition 13 (2017); https://doi.org/10.1364/OFC.2017.Tu2H.7. This work is supported in part by the National Science Foundation (NSF) (ECCS1609549, ECCS-1740296 E2CDA and DMR-1231319) and by Harvard University Office of Technology Development (Physical Sciences and Engineering Accelerator Award). Ultra-low power fiber-coupled gallium arsenide photonic crystal cavity electro-optic modulator. Song, M., Zhang, L., Beausoleil, R. G. & Willner, A. E. Nonlinear distortion in a silicon microring-based electro-optic modulator for analog optical links. This value is the smallest switching energy ever reported for LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, clearly showing the high energy efficiency of our devices. J. Lightwave Technol. 11, 441446 (2017). The detector output was recorded either by a microwave network analyzer (Keysight N5235B) for characterizing the modulation bandwidth or by a sampling oscilloscope module (Keysight 54754A) to record the eye diagram of the switching signal. Express 23, 2352623550 (2015). Optica 6, 845853 (2019). J. Lightwave Technol. Rao, A. et al. Photon. For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. As such, the photonic-crystal mirror on the right side of the defect cavity is designed to be of 100% reflection, while that on the left side has decreased number of holes (Fig. Peer review information Nature Communications thanks Huihui Lu, and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. They also thank Wuxiucheng Wang, Lejie Lu, and Ming Gong for valuable discussions and help on testing. Wang, C., Zhang, M., Stern, B., Lipson, M. & Loncr, M. Nanophotonic lithium niobate electro-optic modulators. Streshinsky, M. et al. Wang, C. et al. A typical design requires a full air cladding to improve the optical quality factor43,45,46. ISSN 1476-4687 (online) Gap denotes the spacing between the gold electrode and the LN cavity, and tw denotes the thickness of the waveguide wing layer. You are using a browser version with limited support for CSS. Light is coupled into and out of the EOM chip via one lensed fiber. The gray curves show the created individual sidebands with Lorentzian-shape resonances and the dashed vertical lines indicates their relative frequency positions. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. Lithium niobate etching is not required for making the hybrid optical waveguides. Using the Lithium Niobate Modulator: Electro-Optical and Mechanical Connections Introduction The purpose of this document is to describe how to use a Lucent Technologies Lithium Niobate (LiNbO 3 ) modulator. PSI offers ultra-high-speed lithium niobate phase modulators. Among various device geometries, photonic-crystal nanoresonators are particularly beneficial in this regard, given their exceptional capability of controlling light confinement and lightmatter interactions on the sub-wavelength scale. This Perspective discusses and compares several different approaches to the design of high-bandwidth, low-voltage electro-optic devices, such as Mach-Zehnder modulators, made using thin-film lithium niobate (TFLN) and strategies for their incorporation as part of a larger photonic integrated circuit (PIC). Lu, H. et al. Optical modulators, using acousto-optic, magneto-optic or electro-optic effects, as the principal components for external modulation of lightwaves, have presently played the important role in modern long-haul ultra-high speed optical communications and photonic signal processing systems. Figure8b, c shows the numerically simulated tuning efficiency and the corresponding optical Q, respectively. Single-chip microprocessor that communicates directly using light. Electron-plasmon interaction on lithium niobate with gold nanolayer and its field distribution dependent modulation. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems. Express 24, 1559015595 (2016). Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. Photon. The insertion loss from the on-chip coupling waveguide to the photonic-crystal cavity is measured to be around 2.2dB, calibrated by subtracting the facet coupling and circulator transmission loss. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Optica 5, 233236 (2018). Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY, 14627, USA, Mingxiao Li,Jingwei Ling,Yang He&Qiang Lin, Institute of Optics, University of Rochester, Rochester, NY, 14627, USA, You can also search for this author in 1e) to enable a partial reflection/transmission, with the hole number optimized for a critical coupling to the cavity. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. B. Attojoule optoelectronics for low-energy information processing and communications. A conventional modulator (b) also uses a buffer oxide layer for velocity matching, but on top of LN which further compromises the electro-optic overlap. b The structure of the unit cell (top: top view; bottom: cross-sectional view). Lett. 1f), so as to take the advantage of the largest electro-optic component r33 of LN. High-quality lithium niobate photonic crystal nanocavities. IEEE J. Sel. Here we overcome these limitations and demonstrate monolithically integrated lithium niobate electro-optic modulators that feature a CMOS-compatible drive voltage, support data rates up to 210 gigabits per second and show an on-chip optical loss of less than 0.5 decibels. and M.L. C.W., M.Z. DOI: 10.1364/OL.426083 Abstract L V cm, and the 3 dB electro-optical bandwidth is about 55 GHz. This is in strong contrast to piezoelectric acoustic modulation which is confined to the vicinity of mechanical resonance frequency45,49,50. Nature 546, 622626 (2017). 8b), which, however, might sacrifice the optical Q due to metallic losses. Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. PubMedGoogle Scholar. The electrodes are designed to be placed close to the photonic-crystal resonator (Fig. Harvards Office of Technology Developmenthas protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. Such flexibility allows us to observe direct transition between the adiabatic driving regime and the non-adiabatic regime simply by continuously sweeping the modulation frequency to across the cavity linewidth. a Recorded scattering parameter S21 for two devices with optical Q of ~14,000 (blue curve) and ~20,000 (orange curve), respectively. Extended Data Fig. Qiang Lin. 8c) due to the decrease of optical mode confinement. Thorlabs free-space electro-optic (EO) amplitude and phase lithium niobate modulators combine our experience with crystal growth and electro-optic materials. For all the recent advances in integrated lithium niobate photonic circuits from frequency combs to frequency converters and modulators one big component has remained frustratingly difficult to integrate: lasers. Lett. Optica 4, 15361537 (2017). The velocity-matched modulator has a typical insertion loss of 4 dB, drive voltage of 5 V, and electrical return loss of . IEEE Sel Top. Laser Photonics Rev. Ayata, M. et al. Phys. IEEE J. Sel. and Q.L. Express 26, 2372823739 (2018). Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. To support on-chip integration, light is coupled to the EOM cavity via an on-chip waveguide (Fig. A review of lithium niobate modulators for fiber-optic communications systems. Lithium niobate photonic-crystal electro-optic modulator. Google Scholar. Hybrid Silicon and Lithium Niobate Modulator Abstract: Hybrid Lithium Niobate (LN) and Silicon photonic (SiPh) integration platform has emerged as a promising candidate to combine the scalability of silicon photonics with the excellent modulation performance of LN. Opt. The electrodes are designed to have a length of 30m to ensure a full coverage of the applied electric field over the entire photonic-crystal structure. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. A. 3, 9194 (2009). e Lattice constant a as a function of position, which is optimized for low insertion loss together with high radiation-limited optical Q. f Top view of the FEM-simulated optical mode field profile of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\). 7a shows another example of a device with optical Q of 20,000, which exhibits a 3-dB bandwidth of about 12.5GHz. . Photonics 4, 518526 (2010). Nat. Furthermore, our approach could lead to large-scale ultra-low-loss photonic circuits that are reconfigurable on a picosecond timescale, enabling a wide range of quantum and classical applications5,10,11 including feed-forward photonic quantum computation. Nature 562, 101104 (2018). Optica 4, 12511258 (2017). 13, 1800228 (2019). All-plasmonic MachZehnder modulator enabling optical high-speed communication at the microscale. CAS Boyd, R. W. Nonlinear Optics (Academic, Cambridge, 2003). 6a). Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . Science 358, 630632 (2017). Low power 50Gb/s silicon traveling wave MachZehnder modulator near 1300nm. Therefore, we expect our devices to have much higher energy efficiency, as will be shown in the following sections. A variety of approaches have been explored for this purpose, including plasmonic structures29,30, slotted dielectric waveguides10, photonic micro-/nanoresonators6,31, etc. Opt. Numerical simulations show that the device exhibits a small capacitance C of C=~22fF, which is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. Thank you for visiting nature.com. Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge. Weigel, P. O. et al. Fortier, T. M. et al. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems, fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. are involved in developing lithium niobate technologies at HyperLight Corporation. Anyone you share the following link with will be able to read this content: Sorry, a shareable link is not currently available for this article. Phys. The broad modulation bandwidth of these devices would thus enable high-speed electro-optic switching. Harnessing plasma absorption in silicon MOS ring modulators, Resonant plasmonic micro-racetrack modulators with high bandwidth and high temperature tolerance, Photonic van der Waals integration from 2D materials to 3D nanomembranes, A power-efficient integrated lithium niobate electro-optic comb generator. Photon. This is a typical signature of resonance modulation in the sideband-unresolved regime, where the cavity resonance follows adiabatically the electric driving signal in a sinusoidal fashion, resulting in a broadened average transmission spectrum (Fig. Google Scholar. You are using a browser version with limited support for CSS. 29 Oxford Street, Cambridge, MA 02138, Research paves the way for high-powered telecommunication systems, 2023 President and Fellows of Harvard College, First integrated laser on lithium niobate chip. Phys. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. Carlson, D. R. et al. 26, 13321335 (2014). 6c, where a driving power of 16mW (corresponding peak-to-peak driving voltage, Vpp, of Vpp=2.5V) splits the cavity resonance into five with notable magnitudes (black curve), resulting in a cavity transmission with five side lobes (blue curve). Express 21, 2700327010 (2013). The modulator is designed to be used in externally modulated fiberoptic transmitters for supertrunking of digitized cable-TV signals as well as for long-haul transmission of OC-192 data. On the other hand, the electrodes are currently placed far from the photonic-crystal cavity so as to leave the optical mode intact to achieve a high optical Q. Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. 1d) to maximize the in-plane electric field Ez, while preventing potential loss induced by metal absorption, which results in a significant electro-optic tuning efficiency of 1.81GHzV1, simulated by the finite element method (see Methods for simulation details). Internet Explorer). Lett. Jian, J. et al. Opt. Javid, U. For microwave simulations, the electric-field values are obtained when a voltage of 1V is applied across the two electrodes. Opt. a Full SEM image of the whole-device structure. 5, 425429 (2011). Appl. Open Access articles citing this article. 20, 150157 (2014). Laser. For LN, however, the EOMs developed so far1,13,14,15,16,17,18,19,20,21,22,23,24,25,26 generally exhibit significant dimensions, leading to significant power required to drive the EOMs. 7b, c implies that the EOM could operate at higher bit rates, which will left for future demonstration. Appl. We believe this is the first LN EOM ever reported with such combined device characteristics and modulation performance. Applied Physics, Optics / Photonics, Tiantsai Lin Professor of Electrical Engineering, Leah Burrows Deep learning with coherent nanophotonic circuits. Sorting out light. a is the lattice constant. In summary, we have demonstrated high-speed LN EOMs with a broad modulation bandwidth of 17.5GHz, a significant tuning efficiency up to 1.98GHzV1, and an electro-optic modal volume as small as 0.58m3. 24, 3400114 (2018). On the other hand, the 30-m length of the electrode is overly conservative since it covers the full length of photonic-crystal structure including the injector, mirrors, and the cavity (Figs. The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. Open Access Q.L. However, when the modulation frequency is tuned above 1.0GHz towards the cavity linewidth, the two side lobes moves towards each other and the spectral shape is considerably distorted, until around 1.8GHz where the transmission spectrum splits into three lobes, with the two side lobes located about 1.8GHz from the center. IEEE J. Quantum Electron. Our scalable modulator devices could provide cost-effective, low-power and ultra-high-speed solutions for next-generation optical communication networks and microwave photonic systems. Science 358, 630632 (2017). Photon. https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948. Phys. The resist residue was removed by a further O+ plasma etching. fabricated the device. 35, 346396 (2017). Witmer, J. D. et al. Rao, A. et al. The demonstration of energy efficient and high-speed EOM at the wavelength scale paves an important step for device miniaturization and high-density photonic integration on the monolithic LN platform, which is expected to find broad applications in communication, computing, microwave signal processing, and quantum photonic information processing. g Simulated optical mode field profile of the second-order TE-like cavity mode \({\mathrm{{TE}}}_{01}^{1}\). fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. Notomi, M., Nozaki, K., Shinya, A., Matsuo, S. & Kuramochi, E. Toward fJ/bit optical communication in a chip. Power efficiency is crucial for the application of electro-optic modulator (EOM), which depends sensitively on the physical size of the device27. Dylan Renaud, Daniel Rimoli Assumpcao, Marko Loncar, Emma Lomonte, Martin A. Wolff, Francesco Lenzini, Qiushi Guo, Ryoto Sekine, Alireza Marandi, Minh A. Tran, Chong Zhang, Tin Komljenovic, Timothy P. McKenna, Hubert S. Stokowski, Amir H. Safavi-Naeini, Kengo Nozaki, Shinji Matsuo, Masaya Notomi, Nature Communications Optical and RF characterization of a lithium niobate photonic crystal modulator. Zhang, M., Wang, C., Cheng, R., Shams-Ansari, A. Article ADS The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. Sun, C. et al. Lee, M. et al. Electron. Silicon optical modulators. Shakoor, A. et al. M.L., J.L., and Y.H. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. ADS High-speed plasmonic modulator in a single metal layer. These authors contributed equally: Cheng Wang, Mian Zhang, John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA, USA, Cheng Wang,Mian Zhang,Maxime Bertrand,Amirhassan Shams-Ansari&Marko Lonar, Department of Electronic Engineering, City University of Hong Kong, Kowloon, Hong Kong, China, Xi Chen,Sethumadhavan Chandrasekhar&Peter Winzer, LP2N, Institut dOptique Graduate School, CNRS, University of Bordeaux, Talence, France, Department of Electrical Engineering and Computer Science, Howard University, Washington, DC, USA, You can also search for this author in Nat. Lithium niobate photonic crystal wire cavity: realization of a compact electro-optically tunable filter. ac, Normalized optical transmission of the 20-mm (a), 10-mm (b) and 5-mm (c) device as a function of the applied voltage, showing half-wave voltages of 1.4V, 2.3V and 4.4V, respectively. Opt. The cavity mode exhibits an extremely small electro-optic modal volume of 1.52(/n)3~0.58m3 (where n is the refractive index of LN). By submitting a comment you agree to abide by our Terms and Community Guidelines. Quantum Electron. [29] Owing to the disparity between the dielectric constants of lithium niobate and silica, the electrical field primarily affected the LN core through the slab. This series of Lithium Niobate fiberoptic Modulators is designed for laboratory test use. & Wang, A. X. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate. The red column represents the parameter design used for the EOMs demonstrated in the main text. Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. 3 Electrical eye diagram at 100Gbaud. Due to the high permittivity of LN at radio frequency, the commonly used full surrounding air cladding43,45,46 is not suitable for EOM since it would significantly reduce the coupling between the optical and electric fields. PubMed Optica 1, 112118 (2014). e, Group refractive indices for both optical and microwave signals as a function of the buried oxide thickness. Modern advanced photonic integrated circuits require dense integration of high-speed electro-optic functional elements on a compact chip that consumes only moderate power. As an example application, we demonstrate electro-optic switching of non-return-to-zero (NRZ) signal at a rate of 11Gbs1, with a switching energy as low as 22fJ per bit that is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. 35, 411417 (2017). 94, 241107 (2009). Koeber, S. et al. and A.S. fabricated the devices. Appl. However, the dielectric constant of LN is ~28 at a microwave frequency, much larger than that of air. Laser Photonics Rev. Full Text electro optic modulator 10.1109/LPT.2021.3056913. 6a, with a broadened spectral linewidth dependent on the driving power. CAS Dong, P. et al. The orange curve in Fig. Nat. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. a Recorded transmission spectra of the \({\mathrm{{TE}}}_{01}^{0}\) cavity mode with RF driving signal at seven different powers from 0 to 12mW, with a power step of 2mW, modulated at 0.6GHz. 8b. Google Scholar. Integrated lithium niobate photonics is a promising platform for the development of high-performance chip-scale optical systems, but getting a laser onto a lithium niobate chip has proved to be one of the biggest design challenges, saidMarko Loncar, the Tiantsai Lin Professor of Electrical Engineering and Applied Physics at SEAS and senior author of the study. Nat. When the modulation frequency is below 1.0GHz, The transmission spectrum remains fairly similar regardless of modulation frequency, as expected from the adiabatic driving discussed above. Correspondence to & Fathpour, S. Compact lithium niobate electrooptic modulators. 3).
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